Gas flow, temperature and pressure model with reactive gas chemistries e. Modeling a dc plasma torch with comsol multiphysics. In this paper, icp chambers with a bias voltage are investigated with comsol software. Acdc module and plasma module the combination of comsol products required to model your application depends on several factors and may include boundary conditions, material properties, physics interfaces, and part libraries. Discussion closed this discussion was created more than 6 months ago and has been closed. Comsolby using the physics of the following modules. A 2d model of a dc plasma torch comsol multiphysics. Electric currents the electric currents interface is used to model dc, ac, and transient electric. The plasma module is a specialized tool for modeling nonequilibrium discharges, which occur in a wide range of engineering disciplines. Modelling and simulation of microplasma discharge device for. Twodimensional plasma transport model was developed in comsol multiphysics plasma module to investigate fundamental issues in ceramic metal halide cmh lamps starting using arhg penning gas mixture. Modelling of the heating of the plasmachemical reactor in comsol. It also provides a quick introduction to creating applications using the application builder.
It is available in html and pdf format from the comsol help desk. Introduction about the heat transfer module 18 why heat transfer is important to modeling. Today, we have provided you with a few examples of what you can do with these conditions. Comsol provides a plasma module with a ccp and an icp interface in order to simulate ccp and icp chambers independently. Plasma module improved stability of the finite volume discretization. These modules are also used for plasma module under comsol software. Some typical applications that are simulated in the interface are capacitors, dielectric sensors, and bushings for high voltage dc insulation. S ti c biliti i comsol m lti h isupporting capabilities in comsol multiphysics rf and acdc modules. A third book, the acdc module reference guide, contains reference material about application mode implementations and commandline programming. Customize comsol multiphysics to meet your simulation needs with applicationspecific modules. Learn how to use multiphysics modeling and simulation to innovate and optimize your engineering designs. Plasma module improved stability of the finite volume discretization in comsol multiphysics version 5. This app investigates the mechanism of power deposition into the plasma due to a sinusoidal electrostatic field operating at. Plasma systems are complex, highly nonlinear systems that can lead to lowtemperature, nonequilibrium discharges.
I have developed a comsol model that looks at heat generation in a plasmonic nanostructure using the waves optic module frequency dependant, single freq and the heat transfer module with a time. Read this book if you are new to comsol multiphysics. Watch this archived webinar to learn how to use the comsol multiphysics software and addon plasma module for the selfconsistent modeling of lowtemperature plasma. The modeling of the dc arc plasma torch is implemented in. The plasma module is based on a series of scientific publications on numerical. Comsol is the developer of comsol multiphysics software, an interactive environment for modeling and simulating scientific and engineering problems. The modeling of the dc arc plasma torch is implemented in comsol by using the physics of the following modules 4,5,6,7. As it turns out, though, the plasma module is way overkill for simple mhd. Magnetohydrodynamic simulations in comsol multiphysics. Pdf on oct 14, 2015, bruno chine and others published modeling a dc plasma torch with comsol multiphysics find, read and cite all the research you need on researchgate. In this archived webinar, jeff crompton and luke gritter of altasim technologies discuss modeling plasmas with the comsol multiphysics software and the plasma module. The plasma module is designed for researchers, engineers, and experimentalists in the field of plasma science. At first, i thought since im simulating a plasma, that the plasma module would be the most appropriate way to go for this simulation. Comsol multiphysics gives you access to very powerful mechanisms for prescribing nonstandard boundary conditions.
Watch this 45minute archived webinar featuring speakers from altasim to learn about plasma modeling in comsol multiphysics and the plasma module. The ideal schottky, thermionic emission, and continuous quasifermi level boundary conditions have been enhanced to improve the. It provides an overview of the comsol environment with examples that show you how to use the comsol desktop user interface and the model builder. In this video, two dimensional heat transfer problem is solved using comsol multiphysics software. Pdf validation and benchmarking of comsol 2d axisymmetric. The equations of conservation of fluid mechanics, heat transfer and electromagnetics are implemented by using the appropriate modules and the multiphysics. Here, well discuss size parameters for free tetrahedral meshing. Comsol multiphysics designed to assist you to solve and model lowfrequency electromagnetics.
Dec 10, 2011 im using comsol 4 for plasma modeling but ive read that this module is just for low temperature plasma, does anybody knows the temperature limitation of the plasma in this module. How to make boundary conditions conditional in your simulation. I even got comsol to give my school a free trial of the plasma module so that i could try it. Model, heavy species transport for chemistry of plasma reactions and electrostatics for electric field potential. Ion trajectories hiiper space propulsion simulation using plasma module erik ziehm1, zhengyu chen2, george h. Simulation of plasma processes is a complex multiphysical problem including the description of.
For more information on how to work with the comsol multiphysics graphical user interface, please refer to the comsol. Nitrogen was considered as a discharge medium instead of air. Using these modules, the model is described by 11 equations, including. The plasma module consists of a suite of physics interfaces that allow arbitrary systems to be modeled. Comsol ab, comsol multiphysicscfd module, users guide, version 5.
Rf module to model plasmas sustained by electromagnetic waves acdc module to model plasmas sustained by induction currents other physics. An example of an icp chamber simulation with comsol is given in ref. Modelling of the heating of the plasmachemical reactor in. For users of the plasma module, comsol multiphysics version 5. Used to compute the ion energy distribution function in plasma models. The microfluidics module can solve for stationary and timedependent flows in 2d and 3d, and can be coupled with any other addon products for further extension of the modeling capabilities. Semiconductor module updates for users of the semiconductor module, comsol multiphysics version 5. The intent of this work is to provide insight into possible design rules that might be.
This chapter introduces you to the capabilities of the module including an. Jun 27, 2016 concluding thoughts on utilizing boundary conditions in comsol multiphysics. The experimental parameters discharge voltage, reduced electric field, maximum voltage were used. You will see the process of modeling capacitively coupled plasma as well as examples of inductive, dc, and waveheated discharges. Hiiper space propulsion simulation using plasma module. In this work we use comsol muliphysics software, specifically the equilibrium discharge multiphysics interface of the plasma module, to model a dc nontrasferred arc plasma torch fig.
The app demonstrates the use of a modal preferences form to allow. Browse the application gallery and download tutorial models with instructions and view example apps. Plasma systems are complex, highly nonlinear systems that can lead to low temperature, nonequilibrium discharges. Size parameters for free tetrahedral meshing in comsol. Particle tracing module mathematical particle tracing specify the equations of motion using massless, newtonian, lagrangian or hamiltonian formulations complete freedom over the equations solved allows, for example, ray tracing to be modeled charged particle tracing. Pdf the numerical simulation of lowpressure radiofrequency rf inductively. Plasma modeling is useful in a variety of industries, such as electronics manufacturing and lasers, because of the unique electrical, chemical, thermal, and radiative. Hai bisogno di aiuto per configurare le tue simulazioni comsol multiphysics.
This discussion is about an older version of the comsol multiphysics software. Acdc module, in 2017 comsol conference in boston, 2017. A square coil is placed on top of a dielectric window and is. For example, to find the heat distribution in a motor, first find the current in the coils using one of the quasistatic interfaces in this module and then couple it to a heat equation in the main comsol multiphysics package or the heat transfer module.
The plasma module is truly a revolutionary product because it combines the universally acclaimed comsol multiphysics user interface with industrial strength algorithms and numerical methods. Sep 11, 2016 in this video, two dimensional heat transfer problem is solved using comsol multiphysics software. Learn about multiphysics modeling and simulation comsol blog. Browse the rest of the new functionality and tutorial models in the plasma module below. Pdf fluid dynamic models are generally appropriate for the investigation of inductively coupled. Pdf modeling a dc plasma torch with comsol multiphysics. Jul 02, 2010 based on comsol multiphysics, the plasma module brings easytouse tools for the study of low temperature plasmas. Comsol multiphysics with plasma module provides a powerful tool capable of researching the discharge process to give insights of plasma physics which are. I mean how much is the upper limitation of plasma temperature. These simulations follow largely from previous comsol work 2. A timevarying electric current passes through a coil creating a timevarying magnetic field around it, which in turn induces azimuthal electric currents in the rarefied gas, leading to break down and formation of a plasma. Particle tracing particle tracing can be used as an alternative to the finite element method for solving real world. Pimenta, some numerical simulation results of swirling flow in dc plasma torch, 15thlatin american workshop on plasma physics, journal of physics.
The module is designed for researchers, engineers and experimentalists in the field of plasma science to model nonequilibrium discharges which occur in a wide range of engineering disciplines. The nist gec ccp reactor provides a platform for studying capacitively coupled plasmas. To help combat this problem, comsol multiphysics has nine builtin size parameter sets when meshing. The main processes of decomposition and destruction of waste by the plasma method take place in a plasma chemical reactor. Simulation of inductively coupled plasma with applied bias. Comsol multiphysics is the core product that is required to run any of the addon modules. Based on comsol multiphysics, the plasma module brings easytouse tools for the study of low temperature plasmas. Furthermore, this example may also be defined and modeled using components from the following product combinations. Paper open access classic spark simulation using comsol software. Pdf fluid model of inductively coupled plasma etcher based on.
The mdd model was simulated in comsol multiphysics using the plasma module in. The module is accompanied by a suite of tutorial and industrially relevant models, which serve as both instructional examples and a foundation for future work. The net result is a product with unprecedented ease of use which can handle arbitrarily complicated industrial and academic problems. As a result, expect less nonconvergence of models when using the finite volume discretization. Model lowtemperature nonequilibrium discharges with the plasma module. Simulating lowtemperature plasma in comsol multiphysics. Heat transfer, structural mechanics and fluid flow. Jan 30, 2014 however, no one wants to be bogged down figuring out the exact specifications for their mesh.
Plasma module equilibrium discharges interface acdc module electric currents, magnetic fields rounded cathode tip, argon and anode using the magnetic vector potential a. Bulk fluid plasma is coupled with analytic sheath model. Comsol multiphysics and plasma module the combination of comsol products required to model your application depends on several factors and may include boundary conditions, material properties, physics interfaces, and part libraries. Comsol multiphysics includes the comsol desktop graphical user interface gui and a set of predefined user interfaces with associated modeling tools, referred to as physics interfaces, for modeling common applications. View the specification chart to find your ideal combination. Modeling a dc plasma torch with comsol multiphysics software.
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